Aurora RF Generator

Power Levels

  •  300W
  •  600W
  •  1000W
  •  2500W

Frequencies

  • 2 MHz
  • 13 MHz
  • 27 MHz
  • 40 MHz

Features

  • Frequency Tuning
  • Ramping
  • Pulsing
  • Arc Management

Applications

  • PECVD
  • Sputtering / PVD
  • Etch
  • Atmospheric Plasma